Handbook of Deposition Technologies for Films and Coatings

Science, Applications and Technology


Author: Peter M. Martin

Publisher: William Andrew

ISBN: 0815520328

Category: Technology & Engineering

Page: 936

View: 2267

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i

Handbook of Deposition Technologies for Films and Coatings

Science, Technology, and Applications


Author: Rointan Framroze Bunshah

Publisher: William Andrew

ISBN: 0815513372

Category: Reference

Page: 861

View: 1843

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Handbook of Deposition Technologies for Films and Coatings, 2nd Ed.

Science, Applications and Technology


Author: Rointan F. Bunshah

Publisher: William Andrew

ISBN: 0815517467

Category: Technology & Engineering

Page: 887

View: 7111

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Handbook of Sputter Deposition Technology

Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS


Author: Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera

Publisher: William Andrew

ISBN: 1437734839

Category: Science

Page: 644

View: 6386

Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.

Handbook of Hard Coatings

Deposition Technolgies, Properties and Applications


Author: Rointan F. Bunshah,Christian Weissmantel

Publisher: Cambridge University Press

ISBN: 9780815514381

Category: Science

Page: 550

View: 4892

Written by 12 leading experts, this is an essential resource for fabrication, characterization and applications in the field of hard coatings and wear resistant surfaces. Offering complete explanations of commercially oriented deposition technology, from traditional vacuum. Includes a detailed introduction to the science of characterizing and measuring hard coatings.

Handbook of Thin Film Deposition

Techniques, Processes, and Technologies


Author: Krishna Seshan

Publisher: William Andrew

ISBN: 1437778739

Category: Technology & Engineering

Page: 392

View: 3977

Resumen: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Semiconductor Manufacturing Handbook, Second Edition


Author: Hwaiyu Geng

Publisher: McGraw Hill Professional

ISBN: 1259583120

Category: Technology & Engineering

Page: 704

View: 3842

Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more

Advanced Materials and Techniques for Radiation Dosimetry


Author: Khalil Arshak,Olga Korostynska

Publisher: Artech House Publishers

ISBN: 9781580533409

Category: Medical

Page: 207

View: 7778

This comprehensive volume is indispensable to engineers and scientists working in dosimetry to protect the health and safety of radiation workers and the general public. Ranging from basic theory to advance concepts, this complete reference covers the physics of radiation, the biological effects of radiation, and the technology of radiation sensing and measurement.

Handbook of sol-gel science and technology. 3. Applications of sol-gel technology


Author: Sumio Sakka

Publisher: Springer Science & Business Media

ISBN: 9781402079689

Category: Ceramic materials

Page: 791

View: 6003

Since Dr. Disiich of Germany prepared a glass lens by the sol-gel method around 1970, sol-gel science and technology has continued to develop. Since then this field has seen remarkable technical developments as well as a broadening of the applications of sol-gel science and technology. There is a growing need for a comprehensive reference that treats both the fundamentals and the applications, and this is the aim of "Handbook of Sol-Gel Science and Technology."The primary purpose of sol-gel science and technology is to produce materials, active and non-active including optical, electronic, chemical, sensor, bio- and structural materials. This means that sol-gel science and technology is related to all kinds of manufacturing industries. Thus Volume 1, "Sol-Gel Processing," is devoted to general aspects of processing. Newly developed materials such as organic-inorganic hybrids, photonic crystals, ferroelectric coatings, photocatalysts will be covered. Topics in this volume include: Volume 2, "Characterization of Sol-Gel Materials and Products, "highlights the important fact that useful materials are only produced when characterization is tied to processing. Furthermore, characterization is essential to the understanding of nanostructured materials, and sol-gel technology is a most important technology in this new field. Since nanomaterials display their functional property based on their nano- and micro-structure, "characterization" is very important. Topics found in Volume 2 include: Sol-gel technology is a versatile technology, making it possible to produce a wide variety of materials and to provide existing substances with novel properties. This technology was applied to producingnovel materials, for example organic-inorganic hybrids, which are quite difficult to make by other fabricating techniques, and it was also applied to producing materials based on high temperature superconducting oxides. "Applications of Sol-Gel Technology," (Volume 3), will cover applications such as: